Skip to header Skip to main navigation Skip to main content Skip to footer

Main navigation

  • Home
    • About Us
    • Wet Bench
    • Single Wafer
    • Release Layer Coating
    • Batch Panel-level Wet Process
    • Single Panel-level Wet Process
    • Glass Release Layer Coating
    • Temporary Bonding
    • Debonding & Cleaning
    • Debonding
    • Taiwan-Headquarters (opens in new tab)
    • China-Shanghai (opens in new tab)
    • USA-California (opens in new tab)
    • Global Presence
    • Inquiry
Home
SCIENTECH EUROPE
We Make It SIMPLE

Single Wafer-Polar Series

Breadcrumb

  • Home
  • Single Wafer-Polar Series
Single Wafer
Use the arrow keys to navigate between tabs

The Polar series is a single-wafer surface treatment system that leverages FEoL research findings and accumulated expertise in related fields. This system offers exceptional performance and scalability for advanced clean and etch processes, with high throughput and a compact footprint. With industry-recognized reliability and productivity, the company continues to evolve its technology to meet customer requirements and create new advanced cleaning solutions, making it a leading domestic single-wafer wet equipment provider.

  • Customized hardware and software
  • Industry-leading chemical recycle rate
  • Transfer solution for high-warpage wafers
  • Multi-layer metal etch capability in the same chamber
  • Excellent etch rate and uniformity

Polar series single-wafer wet process equipment can be applied in the following fields:

  • Semiconductor FEoL (Front-End-of-Line)
  • Semiconductor advanced packaging process
  • Compound semiconductor processes (SiC / GaN / GaAs / InP / …)
  • MEMS (Micro-Electro-Mechanical Systems)
  • LED / Mini LED / Micro LED

The application process is as follows:

  • PR Strip
  • Wafer Clean (APC, Soft spray, Mega sonic)
  • UBM Etch / Metal Etch
  • Flux Clean (Hot DIW)
  • Final Clean (Dual-side, Mega sonic)
  • Mask Clean
  • Frame Clean
  • Spin Etch with Immersion Function

Copyright © 2026 SCIENTECH. All trademarks and images are the property of their respective owners and protected by law.